Biotemplated precise assembly approach toward ultra-scaled high-performance electronics

Yifan Ouyang, Suhui Zhang, Yahong Chen, Mengyu Zhao, Zhihan Liu, Kexin Wang, Zhaoxuan Zhang, Yingxia Liu, Chaoyong Yang, Wei Sun, Jie Shen, Zhi Zhu

Published: 2023-09-04 DOI: 10.1038/s41596-023-00870-3

DNA nanotechnology

ultra-scaled electronics

carbon nanotube FETs

molecular precision assembly

high-performance semiconductors

AI 解读

Supplementary information

Supplementary Information

Supplementary Figs. 1–11.

Efficient and safe single-cell cloning of human pluripotent stem cells using the CEPT cocktail

Profiling native pulmonary basement membrane stiffness using atomic force microscopy

Genetic circuit design automation with Cello 2.0

Synthesis of siRNA nanoparticles to silence plaque-destabilizing gene in atherosclerotic lesional macrophages

Scalable dual-omics profiling with single-nucleus chromatin accessibility and mRNA expression sequencing 2 (SNARE-seq2)

A practical guide to scanning light-field microscopy with digital adaptive optics

Effective high-throughput isolation of fully human antibodies targeting infectious pathogens

Improved sampling and DNA extraction procedures for microbiome analysis in food-processing environments

MOF-derived nanoporous carbons with diverse tunable nanoarchitectures

Tutorial: a statistical genetics guide to identifying HLA alleles driving complex disease

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Woods, D. et al. Diverse and robust molecular algorithms using reprogrammable DNA self-assembly. Nature 567, 366–372 (2019).
Seeman, N. C. DNA in a material world. Nature 421, 427–431 (2003).
Seeman, N. C. Nucleic acid junctions and lattices. J. Theor. Biol. 99, 237–247 (1982).
Dey, S. et al. DNA origami. Nat. Rev. Methods Prim. 1, 13 (2021).
Dietz, H., Douglas, S. M. & Shih, W. M. Folding DNA into twisted and curved nanoscale shapes. Science 325, 725–730 (2009).
Aldaye, F. A., Palmer, A. L. & Sleiman, H. F. Assembling materials with DNA as the guide. Science 321, 1795–1799 (2008).
Douglas, S. M. et al. Self-assembly of DNA into nanoscale three-dimensional shapes. Nature 459, 414–418 (2009).
Ke, Y., Ong, L. L., Shih, W. M. & Yin, P. Three-dimensional structures self-assembled from DNA bricks. Science 338, 1177–1183 (2012).
Ke, Y. et al. DNA brick crystals with prescribed depths. Nat. Chem. 6, 994–1002 (2014).
Yan, H., Park, S. H., Finkelstein, G., Reif, J. H. & LaBean, T. H. DNA-templated self-assembly of protein arrays and highly conductive nanowires. Science 301, 1882–1884 (2003).
Yin, P. et al. Programming DNA tube circumferences. Science 321, 824–826 (2008).
Wagenbauer, K. F., Sigl, C. & Dietz, H. Gigadalton-scale shape-programmable DNA assemblies. Nature 552, 78–83 (2017).
Andersen, E. S. et al. Self-assembly of a nanoscale DNA box with a controllable lid. Nature 459, 73–76 (2009).
Ong, L. L. et al. Programmable self-assembly of three-dimensional nanostructures from 10,000 unique components. Nature 552, 72–77 (2017).
Seeman, N. C. & Sleiman, H. F. DNA nanotechnology. Nat. Rev. Mater. 3, 17068 (2017).
Dai, M., Jungmann, R. & Yin, P. Optical imaging of individual biomolecules in densely packed clusters. Nat. Nanotechnol. 11, 798–807 (2016).
Chen, Y. et al. A synthetic light-driven substrate channeling system for precise regulation of enzyme cascade activity based on DNA origami. J. Am. Chem. Soc. 140, 8990–8996 (2018).
Veneziano, R. et al. Role of nanoscale antigen organization on B-cell activation probed using DNA origami. Nat. Nanotechnol. 15, 716–723 (2020).
Sigl, C. et al. Programmable icosahedral shell system for virus trapping. Nat. Mater. 20, 1281–1289 (2021).
Li, S. et al. A DNA nanorobot functions as a cancer therapeutic in response to a molecular trigger in vivo. Nat. Biotechnol. 36, 258–264 (2018).
Liu, S. et al. A DNA nanodevice-based vaccine for cancer immunotherapy. Nat. Mater. 20, 421–430 (2021).
Zhao, S. et al. A DNA origami-based aptamer nanoarray for potent and reversible anticoagulation in hemodialysis. Nat. Commun. 12, 358 (2021).
Sun, W. et al. Casting inorganic structures with DNA molds. Science 346, 1258361 (2014).
Jing, X. et al. Solidifying framework nucleic acids with silica. Nat. Protoc. 14, 2416–2436 (2019).
Kuzyk, A. et al. DNA-based self-assembly of chiral plasmonic nanostructures with tailored optical response. Nature 483, 311–314 (2012).
Shen, J., Sun, W., Liu, D., Schaus, T. & Yin, P. Three-dimensional nanolithography guided by DNA modular epitaxy. Nat. Mater. 20, 683–690 (2021).
Kong, G. et al. DNA origami-based protein networks: from basic construction to emerging applications. Chem. Soc. Rev. 50, 1846–1873 (2021).
Knudsen, J. B. et al. Routing of individual polymers in designed patterns. Nat. Nanotechnol. 10, 892–898 (2015).
Zhang, P. et al. Capturing transient antibody conformations with DNA origami epitopes. Nat. Commun. 11, 3114 (2020).
Shaw, A. et al. Binding to nanopatterned antigens is dominated by the spatial tolerance of antibodies. Nat. Nanotechnol. 14, 184–190 (2019).
Lee, H. et al. Molecularly self-assembled nucleic acid nanoparticles for targeted in vivo siRNA delivery. Nat. Nanotechnol. 7, 389–393 (2012).
M. van den Brink. Continued scaling in semiconductor manufacturing enabled by advances in lithography. In 2019 IEEE International Electron Devices Meeting (IEDM). 1.2.1–1.2.5 (IEEE, 2019).
Wagner, C. & Harned, N. Lithography gets extreme. Nat. Photonics 4, 24–26 (2010).
The International Technology Roadmap for Semiconductors 2.0: 2015 Edition. (Semiconductor Industry Association, 2015).
Pei, H. et al. Organizing end-site-specific SWCNTs in specific loci using DNA. J. Am. Chem. Soc. 141, 11923–11928 (2019).
Maune, H. T. et al. Self-assembly of carbon nanotubes into two-dimensional geometries using DNA origami templates. Nat. Nanotechnol. 5, 61–66 (2010).
Zhang, Y. et al. Nanoparticle-assisted alignment of carbon nanotubes on DNA origami. Angew. Chem. Int. Ed. 59, 4892–4896 (2020).
Mangalum, A., Rahman, M. & Norton, M. L. Site-specific immobilization of single-walled carbon nanotubes onto single and one-dimensional DNA origami. J. Am. Chem. Soc. 135, 2451–2454 (2013).
Zhao, M. et al. DNA-directed nanofabrication of high-performance carbon nanotube field-effect transistors. Science 368, 878–881 (2020).
Sun, W. et al. Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches. Science 368, 874–877 (2020).
Chen, Y., Yang, C., Zhu, Z. & Sun, W. Suppressing high-dimensional crystallographic defects for ultra-scaled DNA arrays. Nat. Commun. 13, 2707 (2022).
Liu, L. et al. Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics. Science 368, 850–856 (2020).
Qiu, C. et al. Scaling carbon nanotube complementary transistors to 5-nm gate lengths. Science 355, 271–276 (2017).
Tulevski, G. S. et al. Toward high-performance digital logic technology with carbon nanotubes. ACS Nano 8, 8730–8745 (2014).
Chau, R. et al. Benchmarking nanotechnology for high-performance and low-power logic transistor applications. IEEE Trans. Nanotechnol. 4, 153–158 (2005).
Peng, L.-M., Zhang, Z. & Qiu, C. Carbon nanotube digital electronics. Nat. Electron. 2, 499–505 (2019).
Cao, Q. et al. Arrays of single-walled carbon nanotubes with full surface coverage for high-performance electronics. Nat. Nanotechnol. 8, 180–186 (2013).
He, X. et al. Wafer-scale monodomain films of spontaneously aligned single-walled carbon nanotubes. Nat. Nanotechnol. 11, 633–638 (2016).
Yang, Y., Ding, L., Han, J., Zhang, Z. & Peng, L.-M. High-performance complementary transistors and medium-scale integrated circuits based on carbon nanotube thin films. ACS Nano 11, 4124–4132 (2017).
Brady, G. J. et al. Quasi-ballistic carbon nanotube array transistors with current density exceeding Si and GaAs. Sci. Adv. 2, e1601240 (2016).
Cao, Q., Han, S. & Tulevski, G. S. Fringing-field dielectrophoretic assembly of ultrahigh-density semiconducting nanotube arrays with a self-limited pitch. Nat. Commun. 5, 5071 (2014).
Park, H. et al. High-density integration of carbon nanotubes via chemical self-assembly. Nat. Nanotechnol. 7, 787–791 (2012).
Han, S.-J. et al. High-speed logic integrated circuits with solution-processed self-assembled carbon nanotubes. Nat. Nanotechnol. 12, 861–865 (2017).
Shulaker, M. M. et al. Three-dimensional integration of nanotechnologies for computing and data storage on a single chip. Nature 547, 74–78 (2017).
Jin, S. H. et al. Using nanoscale thermocapillary flows to create arrays of purely semiconducting single-walled carbon nanotubes. Nat. Nanotechnol. 8, 347–355 (2013).
Guo, Y. et al. Soft-lock drawing of super-aligned carbon nanotube bundles for nanometre electrical contacts. Nat. Nanotechnol. 17, 278–284 (2022).
Benson, E. et al. DNA rendering of polyhedral meshes at the nanoscale. Nature 523, 441–444 (2015).
Qiu, S. et al. Solution-processing of high-purity semiconducting single-walled carbon nanotubes for electronics devices. Adv. Mater. 31, 1800750 (2019).
Tu, X., Manohar, S., Jagota, A. & Zheng, M. DNA sequence motifs for structure-specific recognition and separation of carbon nanotubes. Nature 460, 250–253 (2009).
Zheng, M. et al. Structure-based carbon nanotube sorting by sequence-dependent DNA assembly. Science 302, 1545–1548 (2003).
Liu, H., Nishide, D., Tanaka, T. & Kataura, H. Large-scale single-chirality separation of single-wall carbon nanotubes by simple gel chromatography. Nat. Commun. 2, 309 (2011).
Ma, Z., Han, J., Yao, S., Wang, S. & Peng, L.-M. Improving the performance and uniformity of carbon-nanotube-network-based photodiodes via yttrium oxide coating and decoating. ACS Appl. Mater. Interfaces 11, 11736–11742 (2019).
Cao, Q., Tersoff, J., Farmer, D. B., Zhu, Y. & Han, S.-J. Carbon nanotube transistors scaled to a 40-nanometer footprint. Science 356, 1369–1372 (2017).
Shulaker, M. M. et al. High-performance carbon nanotube field-effect transistors. In 2014 IEEE International Electron Devices Meeting (IEDM) 33.6.1–33.6.4 (IEEE, 2014).
2018 Semiconductor synthetic biology roadmap. Semicond. Res. Corp. 36 (2018).
Bui, H. et al. Programmable periodicity of quantum dot arrays with DNA origami nanotubes. Nano Lett. 10, 3367–3372 (2010).
Tikhomirov, G., Petersen, P. & Qian, L. Fractal assembly of micrometre-scale DNA origami arrays with arbitrary patterns. Nature 552, 67–71 (2017).
Woo, S. & Rothemund, P. W. K. Self-assembly of two-dimensional DNA origami lattices using cation-controlled surface diffusion. Nat. Commun. 5, 4889 (2014).
Han, S.-P., Maune, H. T., Barish, R. D., Bockrath, M. & Goddard, W. A. DNA-linker-induced surface assembly of ultra dense parallel single walled carbon nanotube arrays. Nano Lett. 12, 1129–1135 (2012).
Zhong, D. et al. Gigahertz integrated circuits based on carbon nanotube films. Nat. Electron. 1, 40–45 (2018).
Lei, T. et al. Low-voltage high-performance flexible digital and analog circuits based on ultrahigh-purity semiconducting carbon nanotubes. Nat. Commun. 10, 2161 (2019).
Fu, Y. et al. Single-step rapid assembly of DNA origami nanostructures for addressable nanoscale bioreactors. J. Am. Chem. Soc. 135, 696–702 (2013).
Sobczak, J.-P. J., Martin, T. G., Gerling, T. & Dietz, H. Rapid folding of DNA into nanoscale shapes at constant temperature. Science 338, 1458–1461 (2012).
Praetorius, F. et al. Biotechnological mass production of DNA origami. Nature 552, 84–87 (2017).
Wang, Y. et al. What molecular assembly can learn from catalytic chemistry. Chem. Soc. Rev. 43, 399–411 (2014).
Zhang, H. et al. Programming chain-growth copolymerization of DNA hairpin tiles for in-vitro hierarchical supramolecular organization. Nat. Commun. 10, 1006 (2019).
Yao, G. et al. Meta-DNA structures. Nat. Chem. 12, 1067–1075 (2020).
Zhang, Z. et al. Doping-free fabrication of carbon nanotube based ballistic CMOS devices and circuits. Nano Lett. 7, 3603–3607 (2007).
Lin, Z., Yang, Y., Jagota, A. & Zheng, M. Machine learning-guided systematic search of DNA sequences for sorting carbon nanotubes. ACS Nano 16, 4705–4713 (2022).
Lin, Z. et al. DNA-guided lattice remodeling of carbon nanotubes. Science 377, 535–539 (2022).
Tang, J. et al. Flexible CMOS integrated circuits based on carbon nanotubes with sub-10 ns stage delays. Nat. Electron. 1, 191–196 (2018).
Arnold, M. S., Green, A. A., Hulvat, J. F., Stupp, S. I. & Hersam, M. C. Sorting carbon nanotubes by electronic structure using density differentiation. Nat. Nanotechnol. 1, 60–65 (2006).
Arnold, M. S., Stupp, S. I. & Hersam, M. C. Enrichment of single-walled carbon nanotubes by diameter in density gradients. Nano Lett. 5, 713–718 (2005).
Tulevski, G. S., Franklin, A. D. & Afzali, A. High purity isolation and quantification of semiconducting carbon nanotubes via column chromatography. ACS Nano 7, 2971–2976 (2013).
M. M. Shulaker et al. Efficient metallic carbon nanotube removal for highly-scaled technologies. In 2015 IEEE International Electron Devices Meeting (IEDM). 32.4.1–32.4.4 (IEEE, 2015)
Kang, S. J. et al. High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes. Nat. Nanotechnol. 2, 230–2326 (2007).

Biotemplated precise assembly approach toward ultra-scaled high-performance electronics

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